MASKDATA(3ICD)

NAME
maskdata - mask definition file for a process

DESCRIPTION
The mask data file maskdata contains the layer information of a process. A considerable number of tools consult this file, e.g. the layout-editors dali(1ICD), kic(1ICD), the plot-preprocessor preplot(1ICD), the design rule checkers autocheck(1ICD) and dimcheck(1ICD), the layout to circuit extractor space(1ICD), and the layout expander exp(1ICD).
For every process mask (layer) a name, a type (interconnect, symbolic, other), a unique identification number, some colors and fill-styles and a pg-tape layer number and pg-tape layer type are specified. When the type of layer layer_name is interconnect, automatically an accessory terminal layer with name t_layer_name is defined. The number of layer-specifications, the process type and some comment on the process is given before the first layer-specification in the file.
Columns 6 through 11 specify colors and fill-styles on various types of graphics hardware. Devices that are supported in the maskdata file are plotters, GKS/Xwindow devices and ColorMask terminals (obsolete). The most important entries are those for graphical programs that use the standard GKS color table such as dali, and the preplot programs such as preplot, which occupy respectively the 8/9 th column and the 10/11 th column in the maskdata file. The columns 6/7 are reserved for ColorMask devices. The columns 4/5 are used for PG-tape generation.

EXAMPLE
As an example, we show the maskdata file for the "c5th" CMOS process:
11	"cmos"	"TUD single metal derived from Philips C500"
0	ps	1   1   1	1  1  1  1  1  0 "polysilicon"
1	od	1   2   1	2  1  2  1  2  0 "active area"
2	in	1   3   1	3  1  4  1  4  0 "metal"
3 	nw	0   4   1	4  1  5  0  5  0 "n-well"
4 	sn	0   5   1	5  1  6  0  6  0 "shallow n implant"
5 	sp	0   6   1	6  1  3  0  3  0 "shallow p implant"
6	con	0   7   1	7  1 15  1  8  0 "contact metal/n+area"
7	cop	0   8   1	7  1 15  1  8  0 "contact metal/p+area"
8	cps	0   9   1	7  1 15  1  8  0 "contact metal/poly"
9	cb	0  10   1	7  1 15  1  8  0 "contact to bondpads"
10	bb	2   0   1	0  0  7  0  8  0 "bounding box"

AUTHOR
A.A.J. de Lange

FILES
ICDPATH/lib/process/processlist
ICDPATH/lib/process/process/maskdata

LIMITATIONS
The user cannot specify his/her own maskdata file. A new maskdata file (new process) must be added to the technology database by the system manager. The appropriate maskdata file for the process in use is automatically selected when a tool is invoked. For this to happen, the maskdata file must be present in the process directory "ICDPATH/lib/process/process" and the name of the process (e.g. "c5th") must be present in the processlist file "ICDPATH/lib/process/processlist".

SEE ALSO
A.A.J. de Lange, "Process Mask Data File: User's Manual", Nelsis Documentation, Delft University of Technology, getproc(1ICD), dali(1ICD).